MEMS Fabrication

 

A Passive Vibration micro-damper

 

The resarchers in MEMS fabrication area develop microscale technologies for applications in the physical and biomedical sciences. Focus areas in the group include MEMS fabrication for microfluidics and integrated micro- and nano-sensing, fabrication and testing of an integrated biochip.

Research Areas


MEMS fabrication for microfluidics and integrated micro/ nano sensing, fabrication and testing of an integrated biochip, microscale flow initiation and behavior, polymeric DNA microchip, nanofabricated gas sensors, carbon nanotubes, nanopolymers


Research Laboratories:

 

Micro systems Fabrication Laboratory

 

Associated Faculty

 

S. Bhattacharya, PhD (University of Missouri, Columbia): Bio MEMS, Lab on Chip, Nano Technology, Microsystems Fabrication and MicroFluids

Niraj Sinha, PhD (University of Waterloo, Canada): Nanotechnology, Bioengineering, Manufacturing systems


Piezo-based micro pump


MEMS fabrication for Microfluidics and Integrated Micro/Nano sensing


Solenoidal Microvalves