Key features include:

  • In-lens SE and BSE detectors for enhanced topographical and compositional contrast
  • Low-voltage imaging capabilities for surface-sensitive analysis
  • Integrated EDS (Energy Dispersive X-ray Spectroscopy) compatibility for elemental analysis

Essential Specification:

  • Resolution : 1.2 nm at 1 kV, 0.9 nm at 15kV
  • Acceleration Voltage : 0.1 to 30 kV
  • Probe Current: 5pA to 400nA
  • Magnification : 30x-1,000,000x
  • Available Detectors : ETD, T1, T2, EDS, IR-CCD, Nav-Cam+
  • EDS Resolution: 129 eV with 30mm2 area
  • EDS Spectral Range: Boron (B) to Uranium (U)