Key features include:
- In-lens SE and BSE detectors for enhanced topographical and compositional contrast
- Low-voltage imaging capabilities for surface-sensitive analysis
- Integrated EDS (Energy Dispersive X-ray Spectroscopy) compatibility for elemental analysis
Essential Specification:
- Resolution : 1.2 nm at 1 kV, 0.9 nm at 15kV
- Acceleration Voltage : 0.1 to 30 kV
- Probe Current: 5pA to 400nA
- Magnification : 30x-1,000,000x
- Available Detectors : ETD, T1, T2, EDS, IR-CCD, Nav-Cam+
- EDS Resolution: 129 eV with 30mm2 area
- EDS Spectral Range: Boron (B) to Uranium (U)