Energy Dispersive Spectroscopye

Model: Oxford INCA x-act


This instrument is procured to upgrade the system Scanning Electron Microscope (Carl Zeiss EVO MA 18).

Energy Dispersive Spectroscopy (EDS) is a non-destructive method for identification of elements present in the sample. Elemental Analysis can be performed over a very small spot on the sample, or a whole frame. This is a useful tool in the field of Engineering, Chemistry, Geology and Biology for identification of corresponding metal, metal alloys, minerals and ceramics.

EDS Capabilities/Specification
Detector is 10mm² Silicon Drift Detector [SDD] incorporated with INCA EDS Analysis Software with features of Spectral imaging, Elemental mapping, MnKα resolution down to 127eV, Liquid Nitrogen free operation, Quant Optimization by Standard Cobalt sample 99.995% [metal basis].


  • Scanning Electron Microscopy (SEM) – Secondary Electron imaging useful for surface morphology studies.

  • Variable Pressure Scanning Electron Microscopy (VP-SEM) –

  • Possible analysis and imaging of non-coated, non-conductive materials with minimal local surface charging

  • Possible analysis of vacuum sensitive materials, such as moist, hydrated, or out-gassing samples

  • Backscattered Electron Imaging – BSE Imaging provides image contrast and is suitable for obtaining surface topography and different elemental composition.

  • Energy-dispersive X-ray Spectroscopy – EDS Analysis ideal for qualitative analysis and spectral mapping during SEM analysis.

  • Metal Coating of Sputtered Gold/Palladium for SEM Imaging


Second Floor, Central Facility
Biological Sciences and
Bioengineering Department (BSBE)


Prof. Dhirendra S. Katti [Convener]
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User Charge:

SEM Imaging [ 90 min. slot]
BSBE Users = Rs. 500
IITK Users = Rs. 1000
Non-IITK Users = Rs. 3500

Gold Coating
BSBE Users = Rs. 250
IITK Users = Rs. 250
Non-IITK Users = Rs. 1000
(Service Tax is applicable for outside IITK users)


Photograph showing an Energy Dispersive X-ray Spectroscope (EDS) (top) procured under CARE- 2013 scheme as part of the E-SEM facility (left) at BSBE Department