SMART COAT 3.0. is compatible with Glass bell jar & cylindrical glass chamber & box type metal chamber. This unique modular design helps the researchers to develop a wide range of thin film process and products with evaporation; ion assisted sputtering or electron beam techniques.

Features

• Semi auto-operations

• Motorized intelligent high vacuum valve protects pumps and substrates Electrically operated valves

• Central and sectoral evaporation Interlocks for operations

• Choice of turbo, oil diffusion pump with same system configurations

HHV Smart Coat 3.0

Accessories

• RF/DC/Pulsed DC power supply 300/500/900° C substrate heater Flash evaporation

  Rotalift

• 100/200 Amps LT sources Quartz lamp

• Electrically/manually operated shutter Rotary drive, cold finger, digital gauges Optical thickness monitor