Electronics Materials Group,M.S.E,I.I.T-Kanpur

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Thin Film Deposition Units

thermal evaporator

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# Article Title
1 GLOBE BOX-MB-OX-SE1
2 Hot plate (two), IKA C-MAG HS7
3 MILIPORE
4 Oven, Ambassader
5 Ozonation chamber , Novascan
6 Spin coater, DUCOM, PR-6-M2
7 SPIN COATER, Laurel WS-400B-6NPP/LITE
8 THERMAL EVAPORATOR (Turbo pump)
9 THERMAL EVAPORATOR (Diffusion pump) VS-114D
10 U V Light Source, photolithography
11 WEIGHING BALANCE, Sartorius, BL210S
12 WEIGHING BALANCE, Sartorius, CPA 225D
13 Vacuum Oven, Mahindra Sc. Int., upto 400oC
14 Muffle furnace, max 1150oC, programmable
15 Muffle furnace, max 1500oC, manually controlled
16 Oxygen tube Furnace
17 Tube furnace, max 1200oC, in N2 atmosphere
18 E- Beam Evaporator
19 PLD, clean bench, hot plate & air oven
20 Rotary pump (for Desiccator vacuum)
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