Specification:

• Sample thickness range: ~50 nm to >100 µm
• Stylus tip size: 2 µm
• Stylus force: 1-15 mg
• Scan length: Up to 50 mm
• Step height repeatability: <5 A for steps up to 1 µm
• Camera: 3.1 MP color camera with selectable magnification
• 2D stress Analysis: Measures tensile and compressive thin film stress in MPa