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Imaging Spectroscopic Ellipsometer |
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Ellipsometry is a well-known non-destructive optical method for determining film thickness and optical properties. Imaging Ellipsometry combines the power of ellipsometry with microscopy. The EP³-SE offers greatest flexibility for measurements with Imaging Ellipsometry. It allows the analysis of multilayer/multi parameter systems and to choose a proper wavelength for absorbing materials. Additionally, a multiple- wavelengths mapping of the field of view (Micro- Mapping) is possible, yielding thickness and/or refractive index maps – similar to AFM surface topographies. For each wavelength the highest available lateral resolution can be achieved, which makes the EP³-SE to a unique instrument for spectroscopic measurements of micro- structured samples. The spectroscopic Imaging Ellipsometer EP³-SE uses a Xenon arc lamp to address up to 46 wavelengths between 365 nm to 1000 nm. |
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Location: |
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Thematic Unit of Excellence, |
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Contact: |
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Prof. Ashutosh Sharma This email address is being protected from spambots. You need JavaScript enabled to view it. Dr. Prabhat Dwivedi This email address is being protected from spambots. You need JavaScript enabled to view it. Dr. Dinesh Deva This email address is being protected from spambots. You need JavaScript enabled to view it. |
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