Field Emission Scanning Electron Microscope

 

The unique variable pressure capabilities add an extra dimension to this FESEM. It enables ultra high resolution imaging and analysis of non conducting specimens without time consuming preparation. The true workhorse in the SUPRA™ family is well suited for failure analysis, life sciences, nanotech and analytical applications. The combination of the large analytical chamber, the new GEMINI® column and the robust VP technology delivers true performance for a wide range of applications. It features magnification power of more than one million times.

Its resolution is up to 2nm. Wide operating voltage range with minimal adjustments required, Short working distance of 8.5 mm for simultaneous high resolution imaging and X-ray analysis, High probe current (up to 20 nA) and high stability better than 0.2 %/h for analytical applications, High efficiency In-lens detector for clear topographic imaging in high vacuum mode, Enhanced VPSE detector in VP mode.

 

Location:

Thematic Unit of Excellence,
IIT Kanpur

Contact:

Prof. Ashutosh Sharma

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Dr. Prabhat Dwivedi

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Dr. Dinesh Deva

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