Pentacene Deposition in Organic thin film Transistors

Patent Status: 

Patent Filed

Indian Patent Applicaton No: 


Date Filed: 



A method for improving mobility of a pentacene based organic thin-film transistor by field assisted deposition.

Key Features: 

  • Process yields a pentacene thin-film transistor with higher carrier mobility, high Idsat, and lower gate leakage in comparison to standard process.
  • Process is simpler and has fewer process steps than the conventional fabrication process.
  • Post- deposition anneal step not needed.
  • Effect of electric field during deposition is more than the effect of dielectric surface treatment with OTS.
  • Treating the surface of the dielectric material by Octadecyltrichlorosilane (OTS) an similar other chemicals reduces the process conditions sensitivities.


  • Industry engaged in fabrication of OTFTs.

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